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华为或计划于26年量产基于LDP技术的EUV光刻机

华为似乎正在开发自己的 EUV 技术,使用激光诱导放电等离子体(LDP)技术,计划在 2026 年实现量产。

据 Techzine 报道,这一技术可能比 ASML 的激光产生等离子体(LPP)技术更节能,同时能产生同样所需的 13.5 纳米 EUV 辐射,用于先进芯片制造。这可能威胁 ASML 的市场主导地位,尤其是在中国芯片制造商如中芯国际因出口限制而受限于 DUV 技术时。

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华为或计划于26年量产基于LDP技术的EUV光刻机

华为似乎正在开发自己的 EUV 技术,使用激光诱导放电等离子体(LDP)技术,计划在 2026 年实现量产。

据 Techzine 报道,这一技术可能比 ASML 的激光产生等离子体(LPP)技术更节能,同时能产生同样所需的 13.5 纳米 EUV 辐射,用于先进芯片制造。这可能威胁 ASML 的市场主导地位,尤其是在中国芯片制造商如中芯国际因出口限制而受限于 DUV 技术时。

techzine

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